40486_2017_53_MOESM1_ESM.xlsx (22.4 kB)
MOESM1 of Realization of large-scale sub-10Â nm nanogratings using a repetitive wet-chemical oxidation and etching technique
dataset
posted on 2017-03-24, 05:00 authored by Min-Seung Jo, Kwang-Wook Choi, Min-Ho Seo, Jun-Bo YoonAdditional file 1. Z-drive profiles measured by AFM; the datasets state the measured values of graph in Fig. 3b.