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MOESM1 of Realization of large-scale sub-10 nm nanogratings using a repetitive wet-chemical oxidation and etching technique

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posted on 2017-03-24, 05:00 authored by Min-Seung Jo, Kwang-Wook Choi, Min-Ho Seo, Jun-Bo Yoon
Additional file 1. Z-drive profiles measured by AFM; the datasets state the measured values of graph in Fig. 3b.

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National Research Foundation of Korea

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    Micro and Nano Systems Letters

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    Keywords

    NanogratingSub-10 nmLarge-scaleSelf-limiting oxidationWet-chemical digital etchingRepetitive wet-chemical oxidation and etching

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    CC BY 4.0

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